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cavity-integrated CNT film-based detector

Based on

1 Articles
2016 Most recent source

Composition

1

Si wafer

SiO2/Si
Type Complex Compound
Formula
Role substrate
2

silver

Type Single Compound
Formula Ag
Role bottom mirror
3

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
4

aluminium oxide

aluminum oxide alumina
Type
Formula Al2O3
Role
5

carbon nanotubes

CNT film
Type Nano Material
Formula
Role channels
6

Ti/Au film

Type Nano Material
Formula
Role electrodes
7

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type
Formula HfO2
Role
8

gold

Type
Formula Au
Role
9

gold

Type Single Compound
Formula Au
Role top mirror

Properties

General physical and chemical properties

Property Value Source
drain current

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Sensor properties

Type of sensor Sensor property Source
light sensor for IR light

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Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Method Source
scanning electron microscopy

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Biological effects

Preparation

References

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