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nanoelectromechanical string device

Based on

1 Articles
2014 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role trench bottom
2

silicon sponge

Type
Formula
Role
3

aluminum-coated silicon nitride string

aluminum-coated silicon nitride layer
Type Nano Material
Formula
Role nanomechanical string (NEMS)

Properties

General physical and chemical properties

Property Value Source
broadening of NEMS oscillation resonance linewidth

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Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Biological effects

Preparation

References

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