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Mo/SiO2/SOG/Si NM/SiO2/Mg MOSFET

Based on

1 Articles
2015 Most recent source

Composition

1

molybdenum

Type Single Compound
Formula Mo
Role substrate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role electrical isolation layer
3

SOG

Type Complex Compound
Formula
Role adhesion layer
4

fluorinated silicon nanomembrane

fluorinated Si NM doped Si NM
Type Nano Material
Formula
Role active layer
5

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role gate dielectrics
6

magnesium

Type Single Compound
Formula Mg
Role source
7

magnesium

Type Single Compound
Formula Mg
Role drain
8

magnesium

Type Single Compound
Formula Mg
Role gate

Properties

General physical and chemical properties

Property Value Source
dissolution in phosphate buffer solution

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Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

References

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