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In2O3-based thin-film transistor

Based on

1 Articles
2015 Most recent source

Composition

1

p-doped silicon

p-doped Si silicon p-Si
Type Single Compound
Formula Si
Role gate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role gate dielectrics
3

indium sesquioxide

indium(III) oxide indium trioxide indium oxide
Type
Formula In2O3
Role
4

aluminium

aluminum
Type Single Compound
Formula Al
Role source
5

silica-coated silicon

Si wafer
Type Nano Material
Formula
Role drain

Properties

General physical and chemical properties

Property Value Source
charge carrier mobility dependent on annealing temperature)

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Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. guEtufvSDl6Ti1wv9sL7
Product

In2O3-based thin-film transistor

References

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