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thermal evaluation chip

Based on

1 Articles
2015 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role substrate
3

titanium

Type Single Compound
Formula Ti
Role adhesion layer
4

platinum

Type Single Compound
Formula Pt
Role heaters
5

gold

Type Single Compound
Formula Au
Role electrodes
6

functionalized graphene oxide coated graphene-based film

FGO-coated GBF
Type Nano Material
Formula
Role thermal spreader
7

copper

Type Single Compound
Formula Cu
Role heat sink

Properties

General physical and chemical properties

Property Value Source
temperature

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Applications

Area Application Source
tools/devices

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • Si/SiO2
  1. EyLTZMEnuG
Product

thermal evaluation chip

References

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