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Cu/Ta2O5/Pt/Ti/SiO2/Si

Based on

1 Articles
2015 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
3

titanium

Type Single Compound
Formula Ti
Role adhesion layer
4

platinum

Type Single Compound
Formula Pt
Role electrodes
5

Ta2O5 film

Type
Formula
Role
6

copper

Type Single Compound
Formula Cu
Role electrodes
7

platinum

Type Single Compound
Formula Pt
Role surface protecting layer

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • SiO2/Si
  • titanium
Product

Cu/Ta2O5/Pt/Ti/SiO2/Si

Method 2

Type: Physical formation
Source:
Starting materials
  • SiO2/Si
  • titanium
Product

Cu/Ta2O5/Pt/Ti/SiO2/Si

Method 3

Type: Physical formation
Source:
Starting materials
  • SiO2/Si
  • titanium
Product

Cu/Ta2O5/Pt/Ti/SiO2/Si

References

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