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silicon nanoelectronic device

Based on

1 Articles
2016 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

boron-doped silicon

B-doped Si
Type Complex Compound
Formula
Role semiconductor layer
3

phosphorus-doped silicon

P-doped Si
Type Complex Compound
Formula
Role source
4

phosphorus-doped silicon

P-doped Si
Type Complex Compound
Formula
Role drain
5

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role gate dielectrics
6

aluminium/aluminium oxide/aluminium stack

Al/AlxOy/Al stack
Type Nano Material
Formula
Role gate
7

phosphorus-doped silicon

P-doped Si
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • boron-doped silicon
  • silicon
  • phosphorus-doped silicon
Product

silicon nanoelectronic device

References

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