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silicon nanomembrane-based transient hydration sensor

Based on

1 Articles
2014 Most recent source

Composition

1

n-doped silicon nanomembrane

n-Si NM
Type Nano Material
Formula
Role semiconductor layer
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role gate dielectrics
3

magnesium

Type Single Compound
Formula Mg
Role drain
4

magnesium

Type Single Compound
Formula Mg
Role source
5

magnesium

Type Single Compound
Formula Mg
Role gate

Properties

General physical and chemical properties

Property Value Source
drain current

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Sensor properties

Type of sensor Sensor property Source
humidity sensor in cell culture medium

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Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • n-doped SOI
  • boron
  1. 5DRXbG
Product

silicon nanomembrane-based transient hydration sensor

Method 2

Type: Physical formation
Source:
Starting materials
  • n-doped SOI
  • boron
  1. wPsDA0
Product

silicon nanomembrane-based transient hydration sensor

References

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