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gold-based temperature sensor

Based on

1 Articles
2016 Most recent source

Composition

1

poly(methyl methacrylate)

methyl methacrylate resin PMMA
Type
Formula
Role
2

silicon

Type Single Compound
Formula Si
Role top layer
3

PI

Type
Formula
Role
4

titanium

Type Single Compound
Formula Ti
Role interconnection
5

copper

Type Single Compound
Formula Cu
Role interconnection
6

titanium

Type Single Compound
Formula Ti
Role interconnection
7

gold

Type Single Compound
Formula Au
Role interconnection
8

chromium

Type Single Compound
Formula Cr
Role sensors
9

gold

Type Single Compound
Formula Au
Role sensors
10

silicon

Type Single Compound
Formula Si
Role separation layer
11

silicon

Type Single Compound
Formula Si
Role bottom layer

Properties

Sensor properties

Type of sensor Sensor property Source
temperature sensor for temperature in human

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Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon
  • poly(methyl methacrylate)
Product

gold-based temperature sensor

References

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