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metal oxide semiconductor p-type fin field-effect transistor

Based on

1 Articles
2014 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role substrate
3

nickel

Type
Formula Ni
Role
4

titanium

Type
Formula Ti
Role
5

boron-doped silicon

Type Complex Compound
Formula
Role source
6

hafnium-contained compound

Hf-contained compound
Type Complex Compound
Formula
Role gate dielectrics
7

titanium nitride

Type
Formula TiN
Role
8

polycrystalline silicon

poly silicon poly-silicon polysilicon silicon poly-Si pc-Si p-Si Si
Type Single Compound
Formula Si
Role gate
9

boron-doped silicon

Type Complex Compound
Formula
Role drain
10

silicon

Type Single Compound
Formula Si
Role channels

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

References

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