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fluorosilane-modified silicon nanowire-based field-effect transistor

Based on

1 Articles
2014 Most recent source

Composition

1

crystalline silicon

c-Si cSi
Type Single Compound
Formula Si
Role substrate
2

(heptadecafluoro-1,1,2,2-tetrahydrodecyl)dimethylchlorosilane-modified silicon nanowires

fluorosilane-modified SiNW
Type Nano Material
Formula
Role semiconductor layer
3

chromium

Type Single Compound
Formula Cr
Role adhesion layer
4

gold

Type Single Compound
Formula Au
Role source
5

titanium/palladium/titanium trilayer

Ti/Pd/Ti trilayer Ti/Pd/Ti film
Type Nano Material
Formula
Role drain
6

silicon nitride

Type Single Compound
Formula Si3N4
Role dielectric layer
7

gold

Type Single Compound
Formula Au
Role gate

Properties

Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • crystalline silicon
  1. qHeJT8PS5GtrFuLD7oi5D1n1V5Wf6Hdyo4vBzI1PcHtPEwuAX
Product

fluorosilane-modified silicon nanowire-based field-effect transistor

References

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