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SiNW nanomechanical resonator

Based on

1 Articles
2014 Most recent source

Composition

1

silicon/silica

Si/SiO2
Type Complex Compound
Formula
Role substrate
2

silicon

Type Single Compound
Formula Si
Role clamp
3

silicon nanowires

silicon NW Si NW SiNW
Type
Formula
Role
4

silicon

Type Single Compound
Formula Si
Role side-gate electrode

Properties

General physical and chemical properties

Property Value Source
electric current

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Sensor properties

Type of sensor Sensor property Source
vibration sensor

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Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Method Source
scanning electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon on insulator
Product

SiNW nanomechanical resonator

References

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