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microcrystalline-Si thin film transistor with self-aligned nickel-silicided scheme

Based on

1 Articles
2011 Most recent source

Composition

1

glass

Type
Formula
Role
2

intrinsic microcrystalline silicon film

i-μC-Si:H film
Type
Formula
Role
3

silica film

SiO2 film
Type
Formula
Role
4

200 nm thick aluminium layer

aluminium layer aluminium film Al layer Al film
Type
Formula
Role
5

silicon nitride capping layer

silicon nitride film Si3N4 film SiN layer
Type
Formula
Role
6

silicon oxide film

SiO2 film
Type
Formula
Role
7

nickel silicide film

Ni2Si film
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • hydrogen
  • glass
  • silicon hydride
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Product

microcrystalline-Si thin film transistor with self-aligned nickel-silicided scheme

References

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