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ITZO-IGZO thin film transistor

Based on

1 Articles
2014 Most recent source

Composition

1

p-Si

Type Complex Compound
Formula
Role gate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role gate dielectrics
3

ITZO film

Type
Formula
Role
4

InGaZnO film

IGZO film
Type
Formula
Role
5

aluminium

aluminum
Type Single Compound
Formula Al
Role source
6

aluminium

aluminum
Type Single Compound
Formula Al
Role drain

Properties

General physical and chemical properties

Property Value Source
drain current

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Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • stannous chloride
  • zinc acetate dihydrate
  • indium(III) nitrate hydrate
  1. SmuuXC8lSg6wQxHS
  2. ZxVQbairjIZTvYwD
  3. ItoxCXRFYQC
  4. 2bKY
  5. EVZkn9ZF
  6. rLK
Product

ITZO-IGZO thin film transistor

References

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