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ZrOx-based ITZO-IGZO thin film transistor

Based on

1 Articles
2014 Most recent source

Composition

1

p-Si

Type Complex Compound
Formula
Role gate
2

substoichiometric zirconium oxide

zirconium oxide zirconia ZrOx
Type Single Compound
Formula ZrO(x)
Role gate dielectrics
3

ITZO film

Type
Formula
Role
4

InGaZnO film

IGZO film
Type
Formula
Role
5

aluminium

aluminum
Type Single Compound
Formula Al
Role source
6

aluminium

aluminum
Type Single Compound
Formula Al
Role drain

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • zirconium tetrachloride
  1. WmGWTuj9O3z74DFA
  2. O26EcKxqvh5u16uH
  3. 1lkmyrap
Product

ZrOx-based ITZO-IGZO thin film transistor

References

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