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copper plugs-integrated memory structure

Based on

1 Articles
2011 Most recent source

Composition

1

silicon

Type
Formula Si
Role
2

cobalt silicide layer

CoSi2 layer
Type
Formula
Role
3

silicon nitride layer

Si3N4 layer
Type
Formula
Role
4

silica layer

SiO2 layer
Type
Formula
Role
5

tantalum/tantalum nitride adhesion layer

tantalum/tantalum nitride layer Ta/TaN adhesion layer Ta/TaN layer
Type
Formula
Role
6

copper pillars

copper plugs Cu pillars Cu plugs
Type
Formula
Role
7

nickel (II) oxide film

NiO film
Type
Formula
Role
8

gold film

Au film
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon
  • cobalt disilicide
Product

copper plugs-integrated memory structure

References

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