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triple-layer Pt/TiO2/TixOy/Ta/TiN device

Based on

1 Articles
2015 Most recent source

Composition

1

Si/SiO2

Type Complex Compound
Formula
Role substrate
2

titanium

Type Single Compound
Formula Ti
Role adhesion layer
3

platinum

Type Single Compound
Formula Pt
Role bottom electrode (BE)
4

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role isolation layer
5

titanium oxide

titania TixOy
Type Single Compound
Formula TiO(x)
Role switching layer
6

tantalum oxide/tantalum

TaO2-x/Ta
Type Complex Compound
Formula
Role oxygen absorption layer
7

titanium(IV) oxide

titanium dioxide titanium oxide titania
Type Single Compound
Formula TiO2
Role insulating layer
8

titanium nitride

nc-TiN
Type Single Compound
Formula TiN
Role top electrode (TE)

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • Si/SiO2
  • titanium
Product

triple-layer Pt/TiO2/TixOy/Ta/TiN device

References

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