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tungsten plugs-integrated memory structure

Based on

1 Articles
2011 Most recent source

Composition

1

silicon

Type
Formula Si
Role
2

cobalt silicide layer

CoSi2 layer
Type
Formula
Role
3

silicon nitride layer

Si3N4 layer
Type
Formula
Role
4

silica layer

SiO2 layer
Type
Formula
Role
5

titanium/titanium nitride adhesion layer

titanium/titanium nitride layer Ti/TiN adhesion layer Ti/TiN layer
Type
Formula
Role
6

tungsten pillars

tungsten plugs W pillars W plugs
Type
Formula
Role
7

nickel (II) oxide film

NiO film
Type
Formula
Role
8

gold film

Au film
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • cobalt disilicide
Product

tungsten plugs-integrated memory structure

References

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