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complementary metal oxide semiconductor-compatible SiNW-FET biosensor

Based on

1 Articles
2014 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role gate
2

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
3

silicon nanowires

silicon NW Si NW SiNW
Type
Formula
Role
4

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role insulating layer

Properties

Sensor properties

Type of sensor Sensor property Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

References

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