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pressure sensor

Based on

1 Articles
2016 Most recent source

Composition

1

silicon

Type
Formula Si
Role
2

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
3

SU-8 photoresist

SU-8
Type
Formula
Role
4

gold

Type Single Compound
Formula Au
Role electrodes
5

1,6-hexanedithiol cross-linked gold nanoparticle film

1,6-hexanedithiol cross-linked GNP film 6DT cross-linked GNP film
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Source
electrical resistance

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Sensor properties

Type of sensor Sensor property Source
pressure sensor

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Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Method Source
optical microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • SiO2/Si
  • SU-8 photoresist
Product

pressure sensor

References

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