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metal-insulator-metal ring resonator

Based on

1 Articles
2014 Most recent source

Composition

1

oxidized silicon

Type Complex Compound
Formula
Role substrate
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type
Formula SiN(x)
Role
3

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
4

chromium

Type Single Compound
Formula Cr
Role adhesion layer
5

gold

Type
Formula Au
Role

Properties

General physical and chemical properties

Property Value Source

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Sensor properties

Type of sensor Sensor property Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

References

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