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metal-insulator-metal ring resonator

Based on

1 Articles
2014 Most recent source

Composition

1

oxidized silicon

Type Complex Compound
Formula
Role substrate
2

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type
Formula SiN(x)
Role
3

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
4

chromium

Type Single Compound
Formula Cr
Role adhesion layer
5

gold

Type
Formula Au
Role

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
cavity quality factor

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Sensor properties

Type of sensor Sensor property Nanomaterial Variant Source
compounds sensor for bovine serum albumin (BSA)

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Applications

Area Application Nanomaterial Variant Source
diagnostics

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Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

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Biological effects

Preparation

References

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