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silicon carbide/silicon temperature sensor

Based on

1 Patents
2010 Most recent source

Composition

1

annealed epitaxial 3C-SiC thin film

silicon carbide layer silicon carbide film
Type
Formula
Role
2

stacked single-crystal silicon nanomembranes

silicon thin film silicon nanofilm silicon layer silicon film Si film Si NM
Type
Formula
Role

Properties

Applications

Area Application Source

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Characterization

Biological effects

Preparation

References

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