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field-effect transistor corrosion sensor

Based on

1 Patents
2010 Most recent source

Composition

1

silicon-on-insulator layer

SOI
Type
Formula
Role
2

silicon channel wall

Type
Formula
Role
3

nafion sensor layer

Type
Formula
Role
4

titanium contact

Type
Formula
Role
5

gold contact

Type
Formula
Role
6

silicon dioxide insulation layer

30 nm thick SiO2 layer silicon dioxide film silica layer silica film SiO2 layer SiO2 film SiO2
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
electric current dependent on humidity

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Applications

Area Application Nanomaterial Variant Source
sensors (excluding biosensors)

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon
Product

field-effect transistor corrosion sensor

Size: not specified

Medium/Support: none

References

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