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carbon nanotube mechanical resonator

Based on

1 Articles
2014 Most recent source

Composition

1

B-doped Si

p-Si
Type Complex Compound
Formula
Role substrate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role gate dielectrics
3

platinum

Type Single Compound
Formula Pt
Role gate
4

silicon-rich silicon nitride

Si-reached silicon nitride silicon nitride a-SiNx SRSN
Type
Formula SiN(x)
Role
5

platinum

Type Single Compound
Formula Pt
Role source
6

platinum

Type Single Compound
Formula Pt
Role drain
7

carbon nanotubes

carbon nanotube CNT
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Source
mechanical resonance frequency

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Applications

Area Application Source
tools/devices

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • Si/SiO2 substrate
Product

carbon nanotube mechanical resonator

References

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