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field-effect transistor corrosion sensor

Based on

1 Patents
2010 Most recent source

Composition

1

silicon-on-insulator layer

SOI
Type
Formula
Role
2

silicon channel wall

Type
Formula
Role
3

nafion sensor layer

Type
Formula
Role
4

titanium contact

Type
Formula
Role
5

aluminium contact

aluminum nanofilm aluminium film aluminum film Al film
Type
Formula
Role
6

silicon dioxide insulation layer

30 nm thick SiO2 layer silicon dioxide film silica layer silica film SiO2 layer SiO2 film SiO2
Type
Formula
Role

Properties

Applications

Area Application Source

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Characterization

Biological effects

Preparation

References

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