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TiN/Hf0.3Zr0.7O2/TiN supercapacitor

Based on

1 Articles
2014 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role substrate
3

titanium nitride

Type Single Compound
Formula TiN
Role electrodes
4

hafnium zirconium oxide

Type
Formula Hf0.3Zr0.7O2
Role
5

titanium nitride

Type Single Compound
Formula TiN
Role top electrode
6

platinum

Type Single Compound
Formula Pt
Role top electrode

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

References

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