Loading ...

SiO2/TiNx multilayered membrane

Based on

1 Articles
2014 Most recent source

Composition

1

silicon nitride

Type
Formula Si3N4
Role
2

silicon

Type Single Compound
Formula Si
Role substrate
3

silicon nitride

Type
Formula Si3N4
Role
4

silica film

SiO2 film
Type Nano Material
Formula
Role dielectric layer
5

titanium nitride film

TiNx film
Type Nano Material
Formula
Role electrodes
6

silica film

SiO2 film
Type Nano Material
Formula
Role dielectric layer
7

silica film

SiO2 film
Type Nano Material
Formula
Role dielectric layer

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
current plot

More information available to subscribers only.

Or, view sample content

Applications

Area Application Nanomaterial Variant Source
membranes

More information available to subscribers only.

Or, view sample content

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

More information/entries available to subscribers only.

Or, view sample content

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Product

SiO2/TiNx multilayered membrane

Size: not specified

Medium/Support: none

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial