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SiO2/TiNx nanoporous multilayered membrane

Based on

1 Articles
2014 Most recent source

Composition

1

silicon nitride

Type
Formula Si3N4
Role
2

silicon

Type Single Compound
Formula Si
Role substrate
3

silicon nitride

Type
Formula Si3N4
Role
4

silica film patterned with nanopores

SiO2 film patterned with nanopores
Type Nano Material
Formula
Role dielectric layer
5

titanium nitride film patterned with nanopores

TiNx film patterned with nanopores
Type Nano Material
Formula
Role electrodes
6

silica film patterned with nanopores

SiO2 film patterned with nanopores
Type Nano Material
Formula
Role dielectric layer
7

silicon nitride

Type
Formula Si3N4
Role

Properties

General physical and chemical properties

Property Value Source
leakage current plot

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Applications

Area Application Source
diagnostics

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Characterization

Method Source
transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Product

SiO2/TiNx nanoporous multilayered membrane

References

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