Fast insight into nanotechnology

Access easily searchable nanoscience data, synthesis methods and literature

silicon-based metal-oxide-semiconductor field-effect transistor

Based on

1 Patents
2013 Most recent source

Composition

1

silicon

Type
Formula Si
Role
2

phosphorus ion

phosphorus
Type
Formula P1+
Role
3

dielectric structure

Type
Formula
Role
4

tantalum(III) nitride

tantalum nitride
Type
Formula NTa
Role
5

aluminium

aluminum
Type
Formula Al
Role

Properties

General physical and chemical properties

Property Value Source

Full content is available to subscribers only

To view content please choose from the following:

Applications

Area Application Source

Full content is available to subscribers only

To view content please choose from the following:

Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon
  • phosphorus ion
Product

silicon-based metal-oxide-semiconductor field-effect transistor

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial