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FinFET

Based on

1 Articles
2015 Most recent source

Composition

1

p-type silicon

Type Complex Compound
Formula
Role substrate
2

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
3

silicon nanowires

silicon NW Si NW SiNW
Type
Formula
Role
4

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role gate dielectrics

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • p-type silicon
  1. l3I6djeoVRCIufX0EReAeQQr54xXFlutOccSjIqGFdRsAcYHpeVQVef1Dl8yucOomydo4fwF9qgKUsQjc5dPS7EURSfrs33Uu5rJFK7
Product

FinFET

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • p-type silicon
  1. zHKgw4K5LN16BxoGeUxeYbjS5O6OYyQBOmaRgGt2FHM2MHbuxYutIPjKkcN8JxzbNkb3dIwN3h2XaRL9yr7y5zmeIaECvwBZov2wg2v
Product

FinFET

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • p-type silicon
  1. dBrP9HRRyhMI9agIHsTJeXENu5UDonXAmbjnpC5jcEngyQEQgZq2xEAiCKO3tLdAJkTnnRQh0oODnUR1DtjaPnHRP7hnpRBgNeKxq5d
Product

FinFET

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • p-type silicon
  1. 5UF6GoRKfONCaESOS0xnl16eJvF76QBPZXecD3TqP0FyqtIDtPGI1QJ4847wy2Y491doYyBfsovRcmYAmywxl65XhFIhlmr0fDekU0i
Product

FinFET

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • p-type silicon
  1. 2rPUbiQdTsKlRnkUu4pNfexYmXPBXXTkqGZKcW4yVRM3mkLT08No1Jk6b5OZRPqIzhbcMRIkXCFJmHtdREIYNkDub1Iwrq9yXJQjzQV
Product

FinFET

References

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