Loading ...

Fast insight into nanotechnology

Access easily searchable nanoscience data, synthesis methods and literature

FinFET device on flexible silicon substrate

Based on

1 Articles
2014 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

silicon

Type
Formula Si
Role
3

buried oxide

BOX
Type
Formula
Role
4

titanium nitride

Type Single Compound
Formula TiN
Role gate
5

NiSi

Type Complex Compound
Formula
Role Ohmic contacts
6

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role gate dielectrics

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
charge carrier mobility dependent on bend radius

More information/entries available to subscribers only.

Or, view sample content

Applications

Area Application Nanomaterial Variant Source
electronics

More information available to subscribers only.

Or, view sample content

Characterization

Method Nanomaterial Variant Source
scanning electron microscopy

More information/entries available to subscribers only.

Or, view sample content

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • silicon on insulator
  1. CXdUFOcpXw1oiXClr5HkpPiVWHVP
Product

FinFET device on flexible silicon substrate

Size: not specified

Medium/Support: none

Method 2

Type: Physical formation
Source:
Starting materials
  • silicon on insulator
  1. hTvI1sR2ejZJdH5dEzMp5oO29xNb
Product

FinFET device on flexible silicon substrate

Size: not specified

Medium/Support: none

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial