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Al-p-Si-SiO2-3-mercaptopropyl trimethoxysilane EIS sensor

Based on

1 Articles
2015 Most recent source

Composition

1

aluminium

aluminum
Type
Formula Al
Role
2

p-doped silicon

p-doped Si silicon p-Si
Type
Formula Si
Role
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role gate dielectrics
4

3-mercaptopropyltrimethoxy silane

MPTMS
Type
Formula C6H16O3SSi
Role

Properties

Sensor properties

Type of sensor Sensor property Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • p-doped silicon
Product

Al-p-Si-SiO2-3-mercaptopropyl trimethoxysilane EIS sensor

References

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