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silicon nanowire piezoresistive effect meter

Based on

1 Articles
2010 Most recent source

Composition

1

silicon nanowires

Type
Formula
Role
2

50-nm thick boron doped silicon layer

Type
Formula
Role
3

150 nm-thick thermally grown silicon dioxide

150 nm thick silicon dioxide film 150 nm-thick silica layer 150 nm-thick SiO2 layer 150 nm thick SiO2 layer 150-nm-thick SiO2 layer
Type
Formula
Role
4

100 nm thick SiO2 substrate

100 nm-thick silica layer silicon oxide nanolayer 100 nm thick SiO2 layer 100-nm-thick SiO2 layer silicon dioxide film SiO2 insulator layer silicon oxide layer silica nanofilm SiO2 nanofilm silica layer silica film SiO2 layer SiO2 layer SiO2 film
Type
Formula
Role
5

50-nm-thick TiN layer

TiN thin film
Type
Formula
Role
6

10-nm-thick SiO2 layer

silica thin film silica nanofilm SiO2 thin film SiO2 nanofilm silica layer SiO2 layer SiO2 film
Type
Formula
Role

Properties

Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

References

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