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carbon nanotubes field effect transistor based inverter

Based on

1 Articles
2015 Most recent source

Composition

1

silicon wafer

Type Complex Compound
Formula
Role substrate
2

single-walled carbon nanotubes

single walled carbon nanotubes single-wall carbon nanotubes carbon nanotubes SWCNT SWNT CNT
Type Nano Material
Formula
Role conducting layer
3

palladium

Type Single Compound
Formula Pd
Role source
4

palladium

Type Single Compound
Formula Pd
Role drain
5

scandium

Type Single Compound
Formula Sc
Role drain
6

scandium

Type Single Compound
Formula Sc
Role source
7

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role gate dielectrics
8

palladium

Type Single Compound
Formula Pd
Role gate
9

gold/titanium film

Au/Ti film
Type Complex Compound
Formula
Role interconnection

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • carbon-containing compound
  • silicon wafer
Product

carbon nanotubes field effect transistor based inverter

References

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