Fast insight into nanotechnology

Access easily searchable nanoscience data, synthesis methods and literature

N-doped ZrO2-based MOS capacitor

Based on

1 Articles
2015 Most recent source

Composition

1

aluminium

aluminum
Type Single Compound
Formula Al
Role back contact
2

p-type Si

Type Complex Compound
Formula
Role substrate
3

N-doped ZrO2 layer

Type Nano Material
Formula
Role gate dielectrics
4

platinum

Type Single Compound
Formula Pt
Role gate

Properties

General physical and chemical properties

Property Value Source

Full content is available to subscribers only

To view content please choose from the following:

Applications

Area Application Source

Full content is available to subscribers only

To view content please choose from the following:

Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • p-type Si
  • tetrakis(ethylmethylamido) zirconium
  • oxygen
  1. G80WHdYfgXMRq29hN
Product

N-doped ZrO2-based MOS capacitor

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • p-type Si
  • tetrakis(ethylmethylamido) zirconium
See all (4)
  1. btJdPE2h4tKYn4DPn
Product

N-doped ZrO2-based MOS capacitor

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial