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N-doped ZrO2-based MOS capacitor

Based on

1 Articles
2015 Most recent source

Composition

1

aluminium

aluminum
Type Single Compound
Formula Al
Role back contact
2

p-type Si

Type Complex Compound
Formula
Role substrate
3

N-doped ZrO2 layer

Type Nano Material
Formula
Role gate dielectrics
4

platinum

Type Single Compound
Formula Pt
Role gate

Properties

General physical and chemical properties

Property Value Nanomaterial Variant Source
capacitance

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Applications

Area Application Nanomaterial Variant Source
electronics

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • p-type Si
  • tetrakis(ethylmethylamido) zirconium
  • oxygen
  1. rZXkjhb1jBJz99fdL
Product

N-doped ZrO2-based MOS capacitor

Size: not specified

Medium/Support: none

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • ammonia
  • p-type Si
  • tetrakis(ethylmethylamido) zirconium
See all (4)
  1. ZdnZqL7WScmSf8hPA
Product

N-doped ZrO2-based MOS capacitor

Size: not specified

Medium/Support: none

References

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