Fast insight into nanotechnology

Access easily searchable nanoscience data, synthesis methods and literature

HfO2-based metal-oxide-semiconductor capacitor

Based on

1 Articles
2014 Most recent source

Composition

1

p-type silicon

Type Complex Compound
Formula
Role substrate
2

hafnium oxide thin film

HfO2 thin film HfO2 nanofilm
Type Nano Material
Formula
Role gate dielectrics
3

aluminium

aluminum
Type Single Compound
Formula Al
Role electrodes

Properties

General physical and chemical properties

Property Value Source
capacitance

4 more entries available to subscribers only.

Or, view sample content

Applications

Area Application Source
electronics

0 more entry available to subscribers only.

Or, view sample content

Characterization

Method Source
atomic force microscopy

0 more entry available to subscribers only.

Or, view sample content

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  • p-type silicon
  1. tkgMQ3DRyd1eH0mrU
  2. H6Oomg
Product

HfO2-based metal-oxide-semiconductor capacitor

Method 2

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  • p-type silicon
  1. oidACC5dfFH6um8zI
  2. GBIqy0
Product

HfO2-based metal-oxide-semiconductor capacitor

Method 3

Type: Physical formation
Source:
Starting materials
  • hafnium(IV) oxide
  • p-type silicon
  1. eHcvTRgrgel30fHOS
  2. JVdOvP
Product

HfO2-based metal-oxide-semiconductor capacitor

References

Full content is available to subscribers only

To view content please choose from the following:

We use cookies to improve your experience with our site. More information

Sign up for a free trial