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amorphous ZrO2-based MOS capacitor

Based on

1 Articles
2015 Most recent source

Composition

1

aluminium

aluminum
Type Single Compound
Formula Al
Role back contact
2

p-type Si

Type Complex Compound
Formula
Role substrate
3

zirconium(IV) oxide

zirconium dioxide zirconia
Type Single Compound
Formula ZrO2
Role gate dielectrics
4

platinum

Type Single Compound
Formula Pt
Role gate

Properties

General physical and chemical properties

Property Value Source
capacitance

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Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • p-type Si
  • tetrakis(ethylmethylamido) zirconium
  • oxygen
  1. dJpIPXCrYz93OjdxS
Product

amorphous ZrO2-based MOS capacitor

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • p-type Si
  • tetrakis(ethylmethylamido) zirconium
  • oxygen
  1. eIWGue6GeiIKHwzuQ
Product

amorphous ZrO2-based MOS capacitor

References

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