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silicon-oxide-nitride-oxide-silicon memory

Based on

1 Articles
2013 Most recent source

Composition

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role tunneling oxide
2

germanium nitride

Type Single Compound
Formula Ge3N4
Role charge-trapping layer
3

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role blocking oxide
4

aluminium

aluminum
Type Single Compound
Formula Al
Role front-side gate electrode
5

silicon

Type Single Compound
Formula Si
Role substrate

Properties

General physical and chemical properties

Property Value Source
capacitance dependent on directions

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Applications

Area Application Source
data storage

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Characterization

Method Source
X-ray photoelectron spectroscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • oxygen
  1. Ec8Htxn
Product

silicon-oxide-nitride-oxide-silicon memory

References

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