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amorphous Hf-In-Zn-O thin film transistor

Based on

1 Articles
2014 Most recent source

Composition

1

soda-lime-silica glass

soda-lime glass glass
Type Complex Compound
Formula
Role substrate
2

molybdenum

Type Single Compound
Formula Mo
Role gate
3

silicon nitride/silicon oxide stack

SiNx/SiOx stack
Type Nano Material
Formula
Role gate dielectrics
4

amorphous hafnium indium zinc oxide thin film

amorphous Hf-In-Zn-O thin film DC-sputtered HIZO thin film DC-grown HIZO thin film a-HIZO thin film
Type Nano Material
Formula
Role channels
5

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role etch stopper
6

molybdenum

Type Single Compound
Formula Mo
Role source
7

molybdenum

Type Single Compound
Formula Mo
Role drain

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
See all (4)
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  2. tWZwvTG96LPlPI
  3. wCXv8h5yqK3VO94FL7NU6lVEgO633aOvksP
  4. XYnzhiIGeGaQ8GVJ
Product

amorphous Hf-In-Zn-O thin film transistor

Method 2

Type: Physical formation
Source:
Starting materials
See all (4)
  1. nYenQHhqrZq9wmG6P7dGIdJW997O9xquu5fBDbqwmcoN5RqOSDTdjIT3pqtrjvZQoGScF9
  2. HLyc8IBzVcPP31
  3. CGFlvtArG7uyEb3cKIc6Q9Ek6ub1pFgjbRq
  4. ySTQmhvjjgucYplcj
Product

amorphous Hf-In-Zn-O thin film transistor

References

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