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Al/HfO2/SiO2/Si metal-oxide-semiconductor capacitor

Based on

1 Articles
2014 Most recent source

Composition

1

p-doped silicon

p-type silicon p-type Si silicon
Type Single Compound
Formula Si
Role substrate
2

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role interface layer
3

hafnium(IV) oxide

hafnium dioxide hafnium oxide hafnia
Type Single Compound
Formula HfO2
Role gate dielectrics
4

aluminium

aluminum
Type Single Compound
Formula Al
Role electrodes

Properties

General physical and chemical properties

Property Value Source
breakdown field

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Applications

Area Application Source
electronics

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Characterization

Method Source
high-resolution transmission electron microscopy

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Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • p-doped silicon
  1. rg
Product

Al/HfO2/SiO2/Si metal-oxide-semiconductor capacitor

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • p-doped silicon
  1. oX
Product

Al/HfO2/SiO2/Si metal-oxide-semiconductor capacitor

Method 3

Type: Chemical synthesis
Source:
Starting materials
  • p-doped silicon
  1. Jp
Product

Al/HfO2/SiO2/Si metal-oxide-semiconductor capacitor

Method 4

Type: Chemical synthesis
Source:
Starting materials
  • p-doped silicon
  1. 8a
Product

Al/HfO2/SiO2/Si metal-oxide-semiconductor capacitor

Method 5

Type: Chemical synthesis
Source:
Starting materials
  • p-doped silicon
  1. eK
Product

Al/HfO2/SiO2/Si metal-oxide-semiconductor capacitor

References

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