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InAs-on-insulator metal-oxide-semiconductor field-effect transistor

Based on

1 Articles
2013 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role buried oxide
3

aluminium oxide

aluminum oxide alumina
Type Single Compound
Formula Al2O3
Role gate dielectrics
4

tantalum

Type Single Compound
Formula Ta
Role gate
5

Ni-InGaAs alloy

Type Complex Compound
Formula
Role source
6

Ni-InGaAs alloy

Type Complex Compound
Formula
Role drain
7

indium(III) arsenide

indium monoarsenide indium arsenide
Type Single Compound
Formula InAs
Role channels
8

indium gallium arsenide

InGaAs
Type Single Compound
Formula In0.3Ga0.7As
Role interface buffer layer

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Method Source

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Biological effects

Preparation

References

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