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Al/SiC nanoelectromechanical resonator

Based on

1 Articles
2013 Most recent source

Composition

Image only illustrates the order and placement of components as described in literature.

1

silicon

Type Single Compound
Formula Si
Role substrate
2

3C-SiC

Type
Formula SiC
Role
3

aluminium

aluminum
Type
Formula Al
Role

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • silicon hydride
  • propane
Product

Al/SiC nanoelectromechanical resonator

References

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