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vertical nanowire array MOS capacitors

Based on

1 Articles
2013 Most recent source

Composition

1

p-doped silicon

p-doped Si p- Si
Type Complex Compound
Formula
Role substrate
2

highly p-doped silicon

highly p-doped Si p+ Si
Type
Formula
Role
3

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
4

benzocyclobutene-based polymer

BCB
Type
Formula
Role
5

aluminium oxide

aluminum oxide alumina
Type
Formula Al2O3
Role
6

titanium/platinum film

Ti/Pt film
Type Nano Material
Formula
Role electrodes

Properties

General physical and chemical properties

Property Value Source
capacitance dependent on frequency modulation

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Applications

Area Application Source
energy storage

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  1. 6ugXiqw
Product

vertical nanowire array MOS capacitors

Method 2

Type: Chemical synthesis
Source:
Starting materials
  1. YQTtkT0
Product

vertical nanowire array MOS capacitors

Method 3

Type: Chemical synthesis
Source:
Starting materials
  1. X4l9m8J
Product

vertical nanowire array MOS capacitors

Method 4

Type: Chemical synthesis
Source:
Starting materials
  1. DNCGPU7
Product

vertical nanowire array MOS capacitors

References

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