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nanoporous gated ion-sensitive field effect transistor

Based on

1 Articles
2012 Most recent source

Composition

1

n-silicon

Type
Formula
Role
2

silica membrane

silica film SiO2 layer SiO2 film
Type
Formula
Role
3

porous alumina layer

Type
Formula
Role
4

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
5

silicon nitride

Type
Formula Si3N4
Role

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • oxygen
  • n-silicon
Product

nanoporous gated ion-sensitive field effect transistor

References

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