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Si3N4 field-effect transistor

Based on

1 Articles
2012 Most recent source

Composition

1

silicon

Type
Formula Si
Role
2

silicon dioxide

silicic oxide silica
Type
Formula SiO2
Role
3

silicon-on-insulator layer

SOI layer
Type
Formula
Role
4

arsenic

Type
Formula As
Role
5

titanium

Type
Formula Ti
Role
6

aluminium

aluminum
Type
Formula Al
Role
7

titanium nitride

Type
Formula TiN
Role
8

gold

Type
Formula Au
Role
9

SiO2 layer

Type
Formula
Role
10

silicon nitride membrane

Si3N4 membrane Si3N4 layer
Type
Formula
Role

Properties

General physical and chemical properties

Property Value Source
pH sensitivity

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Applications

Area Application Source
sensors (excluding biosensors)

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
Product

Si3N4 field-effect transistor

References

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