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gold impedance sensor

Based on

1 Articles
2012 Most recent source

Composition

1

Ni film

Type
Formula
Role
2

Ti film

Type
Formula
Role
3

Au film

Type
Formula
Role
4

300 nm thick silica layer

300 nm thick SiO2 layer silicon dioxide film silica layer silica film SiO2 layer SiO2 film SiO2 film SO2 layer
Type
Formula
Role
5

silicon nitride

Type
Formula Si3N4
Role

Properties

Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Physical formation
Source:
Starting materials
  1. SSUXHZ7oADKfYN3Pnz6iK7MYhcJP617rVbnL
Product

gold impedance sensor

References

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