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TiN/HfO:N/SiO2/Si stack

Based on

1 Articles
2012 Most recent source

Composition

1

silicon

Type
Formula Si
Role
2

SiO2 layer

Type
Formula
Role
3

HfO:N layer

Type
Formula
Role
4

TiN thin film

TiN layer TiN film
Type
Formula
Role
5

polycrystalline silicon film

poly-Si layer poly-Si film
Type
Formula
Role

Properties

Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • oxygen
Product

TiN/HfO:N/SiO2/Si stack

Method 2

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • oxygen
Product

TiN/HfO:N/SiO2/Si stack

References

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