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InGaAs-based field-effect transistor

Based on

1 Patents
2013 Most recent source

Composition

1

silicon

Type Single Compound
Formula Si
Role substrate
2

amorphous aluminium oxide

amorphous aluminum oxide aluminium(III) oxide amorphous alumina aluminium oxide amorphous Al2O3 aluminum oxide alumina a-Al2O3
Type Single Compound
Formula Al2O3
Role burning oxide layer
3

indium gallium arsenide multilayer laminate

Type Nano Material
Formula
Role semiconductor layer
4

Ni-InGaAs alloy

Type Complex Compound
Formula
Role source/drain
5

amorphous aluminium oxide

amorphous aluminum oxide aluminium(III) oxide amorphous alumina aluminium oxide amorphous Al2O3 aluminum oxide alumina a-Al2O3
Type Single Compound
Formula Al2O3
Role gate dielectrics
6

tantalum

Type Single Compound
Formula Ta
Role gate

Properties

General physical and chemical properties

Property Value Source
drain current

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Applications

Area Application Source
electronics

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Characterization

Method Source
transmission electron microscopy

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Biological effects

Preparation

References

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