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cylindrical gate-all-around Si-nanowire FET CMOS inverter

Based on

1 Articles
2014 Most recent source

Composition

1

silicon dioxide

silicic oxide silica
Type Single Compound
Formula SiO2
Role dielectrics
2

B-doped silicon

B-doped silicon p-Si
Type Complex Compound
Formula
Role source
3

p-doped silicon nanowires

p-silicon NW p-Si NW p-SiNW
Type
Formula
Role
4

polycrystalline silicon

poly silicon poly-silicon polysilicon silicon poly-Si pc-Si p-Si Si
Type Single Compound
Formula Si
Role gate
5

B-doped silicon

B-doped silicon p-Si
Type Complex Compound
Formula
Role drain
6

nitride

Type
Formula
Role
7

aluminium

aluminum
Type
Formula Al
Role

Properties

General physical and chemical properties

Property Value Source
current density

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Applications

Area Application Source
electronics

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Characterization

Biological effects

Preparation

References

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