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dielectric charge trapping nonvolatile memory

Based on

1 Articles
2013 Most recent source

Composition

1

low-doped p-type silicon

p-Si
Type Complex Compound
Formula
Role substrate
2

Al2O3/ZrO2/SiO2/Si stacks

MAZOS stacks
Type Nano Material
Formula
Role dielectric layer
3

palladium

Type Single Compound
Formula Pd
Role gate electrode

Properties

General physical and chemical properties

Property Value Source

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Applications

Area Application Source

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Characterization

Biological effects

Preparation

Method 1

Type: Chemical synthesis
Source:
Starting materials
  • silicon
  • low-doped p-type silicon
  • atomic oxygen
Product

dielectric charge trapping nonvolatile memory

References

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